Thin Film Deposition & Thermal Treatment
| Thin film deposition | Furnace |
 201403_Rens 201403_Kitano |
Five Targets Ultra High Vacuume rf Sputtering System | |
|
||
 [manual] |
Single Target rf Sputtering System (SPF-210HS, Anelva) | |
|
||
 [manual] |
Single Target rf Sputtering System (SPF-210?, Anelva) | |
|
||
 |
Laser Ablation and Three Targets Sputtering System | |
|
||
Record book Vacuum Deposition [manual] |
Vacuum Deposition (SVC-700T, Sanyu Electron) | |
|
|
||
[manual] |
ドライエッチング装置 (L-201D, Avelva) | |
|
|
||
Contact:
Prof. Minoru FUJII
Department of Electrical and Electronic Engineering, Graduate School of
Engineering, Kobe University
Rokkodai, Nada, Kobe 657-8501, Japan
